The workshop is scheduled for October 7-9, 2024.
| Monday, October 7th | |||
| 16:00-17:30 | Welcome Reception Sponsored by Silex Microsystems | ||
| 17:30-18:30 | Keynote Speaker 1: Dan Armbrust Silicon Catalyst | ||
| Tuesday, October 8th | |||
| 7:30-8:00 | Registration & Breakfast | ||
| 8:00-8:30 | Opening Remarks Matteo Rinaldi, David Horsley NanoSI, Northeastern University | ||
| 8:30-9:15 | Keynote Speaker 2: Tsu-Jae King Liu University of California, Berkeley | ||
| 9:15-10:30 | Session 1: Analog Circuits and Non-Conventional Computing | ||
| Title | Speaker | Affiliation | |
| 9:15 | Invited: Analog Computing Based Code-Domain MIMO Radars | Aravind Nagulu | Washington U. in St. Louis |
| 9:50 | Improvements in Parametric Oscillator-based Analog Computation due to MEMS Integration | Nicolas Casilli | Northeastern University |
| 10:10 | MEMS Oscillator Ising Machine via Sub-Harmonic Injection Locking (SHIL) Enabled Synchronization | Philip Feng | U. Florida |
| 10:30-10:45 | Networking Break | ||
| 10:45-12:00 | Session 2: Sensors | ||
| Title | Speaker | Affiliation | |
| 10:45 | Invited: Extreme-environment Sensors & Microelectronics | Debbie Senesky | Stanford |
| 11:20 | Fly-inspired microphones with piezoelectric readout | Xiaoyu Niu | UT Austin |
| 11:40 | Innovative Fabrication and Characterization of Curved PMUT for Enhanced Ultrasound Performance | Chichen Huang | Northeastern University |
| 12:00-13:00 | Lunch | ||
| 13:00-14:40 | Special Session: Levitated and Trapped Accurate microSystems (LeviTAS) | ||
| Title | Speaker | Affiliation | |
| 13:00 | Invited: Introduction to Micro Positioning, Navigation and Timing (PNT) at DARPA DSO | Sunil Bhave | DARPA DSO |
| 13:20 | Contactless Electrostatic Control of a Proof Mass | Bob Mcloskey | UCLA |
| 13:40 | Full Levitation in Magnetically Stabilized microSystems (FLi-MaSS) | Jaesung Lee | University of Central Florida |
| 14:00 | Untethered Hemispherical Resonance Gyroscope | Andrei Shkel | UCI |
| 14:20 | Voltage and Charge Control for Free-space Electrostatic Levitation | Noah Christian | Leidos |
| 14:40-15:00 | Networking Break | ||
| 15:00-16:00 | Contributed Posters | ||
| 16:00-17:55 | Session 3: Hetero-Integration and Layer Transfer | ||
| Title | Speaker | Affiliation | |
| 16:00 | Invited: X on Insulator (XOI) Technology | Ali Javey | UC Berkeley |
| 16:35 | Micro-transfer Printing GaN for Advanced RF Functionality and Manufacturing | Shawn Mack | NRL |
| 16:55 | Integration of AlN MEMS on AlN Substrate using Film Transfer Method | Mingyo Park | Pennsylvania State University |
| 17:15 | Separation of Thin Layers from Wide Bandgap Semiconductors via Sonic Lift-Off | Taylor Black | Crystal Sonic, Inc. |
| 17:35 | A wireless, self-powered mm-scale MEMS sensor platform through heterogeneous integration of SCµM and HV SOI CMOS | Yichen Liu | UC Berkeley |
| 18:00-20:00 | Conference Banquet | ||
| Wednesday, October 9th | |||
| 7:30-8:30 | Registration & Breakfast | ||
| 8:30-9:45 | Keynote Speaker 3: Dana Weinstein Purdue University | ||
| 9:45-10:45 | Session 4: RF and Acoustic Wave Devices | ||
| Title | Speaker | Affiliation | |
| 9:45 | Low-Loss Fundamental Mode Magnetoacoustic RF Devices with Giant Non-reciprocity | Bin Luo | Northeastern University |
| 10:05 | Solidly Mounted Resonator Platform Using ScAlN on Bottom Electrode on Bragg Reflector | Yinan Wang | UT Austin |
| 10:25 | Advancements on Super High Frequency ScAlN Nanoacoustic Technology | Gabriel Giribaldi | Northeastern University |
| 10:45 | CMOS integrated GHZ Ultrasonic MEMS | Amit Lal | Geegah & Cornell University |
| 10:45-11:00 | Networking Break | ||
| 11:00-12:15 | Session 5: Photonics | ||
| Title | Speaker | Affiliation | |
| 11:00 | Invited: Silicon Non-Volatile Optical Memory and All-Silicon Photonic Integrated Circuits | Yuan Yuan | HP Labs |
| 11:35 | Lithium tantalate photonic integrated circuits for volume manufacturing | Zihan Li | EPFL |
| 11:55 | A Cantilever Based Accelerometer in Silicon Photonics Platform | Yuqi Meng | UT Austin |
| 12:15-13:15 | Lunch | ||
| 13:15-14:15 | Open Posters | ||
| 14:15-16:15 | Special Session: Optomechanical Thermal Imaging (OpTIm) | ||
| Title | Speaker | Affiliation | |
| 14:15 | Invited: Optomechanical Thermal Imaging: Towards Next-generation Infrared Detectors | Mukund Vengalattore | DARPA DSO |
| 14:35 | Chip-scale precision optomechanical sensing near the thermodynamical limits | Chee-Wei Wong | UCLA |
| 14:55 | Room-temperature optomechanical-resonator-based sensor on thin film lithium niobate | Yue Yu | USC |
| 15:15 | Ultrathin Trampoline Optomechanical Resonator Pixels for Uncooled Infrared (IR) Detection | Philip Feng | U. Florida |
| 15:35 | 30%-Doped AlScN Nanoplates as Uncooled and Ultra-Fast Detectors for IR Imaging | Aurelio Venditti | Northeastern University |
| 15:55 | Sensitive infrared detection via optomechanical spring sensing | Chen Qian | U Penn |
| 16:15-17:00 | Panel Session: Microsystems in the Era of the CHIPS Act – where do we go from here? | ||
| 17:00 | Workshop Adjorns |